High Concentration Ozone Analyzers are designed to monitor ozone generator output up to 900 g/m3. Our high concentration analyzers can be used in-line with full flow for ultra-pure applications and also side-stream with reduced flow.
Off-gas Ozone Analyzers use a custom-designed ozone sampling and conditioning system that removes water droplets and water vapor from the inlet sample gas and destroys ozone in the gas stream exhaust.
Ozone Safety Analyzers and Ozone Leak Detectors (TLV/Ambient) are ideal for measuring ozone leaks in the workplace and inside semiconductor tools. Our hand-held, battery-operated spot checkers are compact, lightweight, and easy to use.
Dissolved Ozone Analyzers measure dissolved ozone from ppb levels up to 150 ppm. Our dissolved ozone analyzers can be used in-line in re-circulating streams and also in side-stream configurations.
Ozone Controller Systems provide microprocessor-based ozone measurement and ozone generator control in both gas and liquid phases simultaneously. Our ozone controller systems feature multiple inputs and outputs and multiple, independent servo-loop control.
Ozone Generators are designed to produce ultra clean, high purity and very high concentration ozone gas that is ideal for a wide range of Semiconductor process applications.
Ozone Destruct Systems decompose ozone to safe levels via the catalytic conversion of ozone (O3) to oxygen (O2). We also offer destruct systems that are based on thermal decomposition of ozone. Our systems can handle most ozone destruction requirements and are designed for TLV and OSHA compliance.